N USA offers several ozone delivery systems that are carefully designed to meet the most stringent safety performance requirements while delivering high purity ozone with very low cost of ownership. These systems combine one or more ozone generators and servo-loop control with IN USA’s advanced ozone monitoring instrumentation to provide a low-cost, turnkey system that can be customized to meet your application requirements.
IN USA’s Dissolved Ozone Delivery Systems offer high purity, bubble-free high concentration ozone for a wide range of semiconductor applications. The system is designed to provide dissolved ozone in water on demand, at the point of use for multi-bath applications.
- Typical ozone delivery system features include:
- Compact size( 40”H x 24″W x 31″D)
- One or more ozone generators
- Continuous ozone output indication and control
- Interface with host tool capability
- Built-in safety monitoring subsystem and interlocks
- VCR fittings
- Cooling water leak detector for safe operation
- Extensive diagnostics
- Free-standing rack cabinet enclosure
- Low cost of ownership